Near field x-ray lithography simulations for printing fine...

Journal of Physics D Applied Physics 2003 / 10 Vol. 36; Iss. 20

Near field x-ray lithography simulations for printing fine bridges

Bourdillon, Antony J, Boothroyd, Chris B, Williams, Gwyn P, Vladimirsky, Yuli
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Volume:
36
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/36/20/008
Date:
October, 2003
File:
PDF, 1.03 MB
english, 2003
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