Influences of Annealing on Residual Stress and Structure of...

Chinese Physics Letters 2007 / 10 Vol. 24; Iss. 10

Influences of Annealing on Residual Stress and Structure of HfO 2 Films

Yan-Ming, Shen, Shu-Ying, Shao, Zhen-Xia, Deng, Hong-Bo, He, Jian-Da, Shao, Zheng-Xiu, Fan
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Volume:
24
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/24/10/069
Date:
October, 2007
File:
PDF, 256 KB
english, 2007
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