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Structure Characterization of HSQ Films for Low Dielectrics Using D5 as Sacrificial Porous Materials
Gui-Qin, Yin, Zhao-Yuan, Ning, Qiang-Hua, YuanVolume:
24
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/24/12/066
Date:
December, 2007
File:
PDF, 169 KB
english, 2007