Positive and Negative Pulse Etching Method of Porous...

Chinese Physics Letters 2007 / 05 Vol. 24; Iss. 5

Positive and Negative Pulse Etching Method of Porous Silicon Fabrication

Jin, Ge, Wen-Jing, Yin, Yong-Fu, Long, Xun-Min, Ding, Xiao-Yuan, Hou
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Volume:
24
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/24/5/065
Date:
May, 2007
File:
PDF, 472 KB
english, 2007
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