A simulation study of low energy sputtering angular...

A simulation study of low energy sputtering angular distribution

Liping, Zheng, Fuzhai, Cui
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Volume:
5
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/5/4/001
Date:
April, 1988
File:
PDF, 240 KB
english, 1988
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