Nanolithography

Ferry, D K, Khoury, M, Pivin, D P, Connolly, K M, Whidden, T K, Kozicki, M N, Allee, D R

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Volume:

Language:

english

Journal:

Semiconductor Science and Technology

DOI:

10.1088/0268-1242/11/11S/017

Date:

November, 1996

File:

PDF, 403 KB

english, 1996

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