Dry-etch damage and its recovery in InGaN/GaN...

Semiconductor Science and Technology 2003 / 06 Vol. 18; Iss. 6

Dry-etch damage and its recovery in InGaN/GaN multi-quantum-well light-emitting diodes

Lee, Ji-Myon, Huh, Chul, Kim, Dong-Joon, Park, Seong-Ju
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Volume:
18
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/18/6/323
Date:
June, 2003
File:
PDF, 129 KB
english, 2003
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