Performance improvement of the EEPROM cells with the...

Performance improvement of the EEPROM cells with the standard logic process featuring a metal finger coupling capacitor

Tang, Poren, Huang, Ru, Wu, Dake, Kuang, Yongbian, Wang, Yangyuan
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Volume:
25
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/25/12/125003
Date:
December, 2010
File:
PDF, 432 KB
english, 2010
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