SINIS fabrication process for realizing integrated circuits...

SINIS fabrication process for realizing integrated circuits in RSFQ impulse logic

Balashov, D, Khabipov, M I, Buchholz, F-Im, Kessel, W, Niemeyer, J
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Volume:
12
Language:
english
Journal:
Superconductor Science and Technology
DOI:
10.1088/0953-2048/12/11/351
Date:
November, 1999
File:
PDF, 167 KB
english, 1999
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