Erbium-doped silicon-rich silicon dioxide/silicon thin...

Journal of Physics Condensed Matter 2002 / 01 Vol. 14; Iss. 3

Erbium-doped silicon-rich silicon dioxide/silicon thin films fabricated by metal vapour vacuum arc ion source implantation

Xu, Fei, Xiao, Zhisong, Cheng, Guoan, Yi, Zhongzhen, Zhang, Tonghe, Gu, Lanlan, Wang, Xun
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Volume:
14
Language:
english
Journal:
Journal of Physics: Condensed Matter
DOI:
10.1088/0953-8984/14/3/103
Date:
January, 2002
File:
PDF, 211 KB
english, 2002
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