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Thin-film resistance thermometers on silicon wafers
Kreider, Kenneth G, Ripple, Dean C, Kimes, William AVolume:
20
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/20/4/045206
Date:
April, 2009
File:
PDF, 176 KB
english, 2009