Force, deflection and power measurements of toggled microthermal actuators
Lai, Yongjun, McDonald, James, Kujath, Marek, Hubbard, TedVolume:
14
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/14/1/307
Date:
January, 2004
File:
PDF, 301 KB
english, 2004