Mechanical properties of aerogel-like thin films used for...

Journal of Micromechanics and Microengineering 2004 / 05 Vol. 14; Iss. 5

Mechanical properties of aerogel-like thin films used for MEMS

Yokokawa, Ryuji, Paik, Jong-Ah, Dunn, Bruce, Kitazawa, Nobuaki, Kotera, Hidetoshi, Kim, Chang-Jin
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Volume:
14
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/14/5/004
Date:
May, 2004
File:
PDF, 246 KB
english, 2004
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