Influence of liquid surface tension on stiction of SOI MEMS
Raccurt, O, Tardif, F, d'Avitaya, F Arnaud, Vareine, TVolume:
14
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/14/7/031
Date:
July, 2004
File:
PDF, 539 KB
english, 2004