End-coupled optical waveguide MEMS devices in the indium...

Journal of Micromechanics and Microengineering 2006 / 04 Vol. 16; Iss. 4

End-coupled optical waveguide MEMS devices in the indium phosphide material system

Pruessner, Marcel W, Siwak, Nathan, Amarnath, Kuldeep, Kanakaraju, S, Chuang, Wen-Hsien, Ghodssi, Reza
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Volume:
16
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/16/4/021
Date:
April, 2006
File:
PDF, 975 KB
english, 2006
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