Laterally stacked glass substrates with high density...

Journal of Micromechanics and Microengineering 2007 / 03 Vol. 17; Iss. 3

Laterally stacked glass substrates with high density electrical feedthroughs

Tanaka, Shuji, Fujimoto, Satoshi, Ito, Osamu, Choe, Seong-Hun, Esashi, Masayoshi
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Volume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/3/023
Date:
March, 2007
File:
PDF, 983 KB
english, 2007
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