Fabrication of a bubble-driven arrayed actuator for a...

Journal of Micromechanics and Microengineering 2008 / 06 Vol. 18; Iss. 6

Fabrication of a bubble-driven arrayed actuator for a tactile display

Shikida, Mitsuhiro, Imamura, Tsubasa, Ukai, Shinji, Miyaji, Takaaki, Sato, Kazuo
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Volume:
18
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/18/6/065012
Date:
June, 2008
File:
PDF, 551 KB
english, 2008
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