Development of a ‘bi-layer lift-off’ method for high flow...

Development of a ‘bi-layer lift-off’ method for high flow rate and high frequency Nitinol MEMS valve fabrication

Seong, Myunghoon, Mohanchandra, K P, Lin, Yohan, Carman, Gregory P
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
18
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/18/7/075034
Date:
July, 2008
File:
PDF, 1.21 MB
english, 2008
Conversion to is in progress
Conversion to is failed