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Development of a ‘bi-layer lift-off’ method for high flow rate and high frequency Nitinol MEMS valve fabrication
Seong, Myunghoon, Mohanchandra, K P, Lin, Yohan, Carman, Gregory PVolume:
18
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/18/7/075034
Date:
July, 2008
File:
PDF, 1.21 MB
english, 2008