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Mass detection of elastically distributed ultrathin layers...

Mass detection of elastically distributed ultrathin layers using piezoresponse force microscopy

Bashash, Saeid, Salehi-Khojin, Amin, Jalili, Nader, Thompson, Gary Lee, Vertegel, Alexey, Müller, Maren, Berger, Rüdiger
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Volume:
19
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/19/2/025016
Date:
February, 2009
File:
PDF, 1.14 MB
english, 2009
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