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Design and fabrication of a self-aligned parallel-plate-type silicon micromirror minimizing the effect of misalignment
Yoo, Byung-Wook, Park, Jae-Hyoung, Jin, Joo-Young, Jang, Yun-Ho, Kim, Yong-KweonVolume:
19
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/19/5/055004
Date:
May, 2009
File:
PDF, 1.81 MB
english, 2009