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A photovoltaic pn junction micro vertical comb-drive actuator
Huang, Hsin-Yu, Hsu, Hsiu-Ting, Lin, Hung-Yi, Chiu, Yi, Fang, WeileunVolume:
20
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/20/10/105014
Date:
October, 2010
File:
PDF, 1.19 MB
english, 2010