Nanofabrication processes for single-ion implantation of...

Smart Materials and Structures 2002 / 10 Vol. 11; Iss. 5

Nanofabrication processes for single-ion implantation of silicon quantum computer devices

McKinnon, Rita P, Stanley, Fay E, Lumpkin, Nancy E, Gauja, Eric, Macks, Linda D, Mitic, Mladen, Chan, Victor, Peceros, Katia, Buehler, Tilo M, Dzurak, Andrew S, Clark, Robert G, Yang, Changyi, Jamieso
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Volume:
11
Language:
english
Journal:
Smart Materials and Structures
DOI:
10.1088/0964-1726/11/5/317
Date:
October, 2002
File:
PDF, 289 KB
english, 2002
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