![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 2 February 2013)] Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI - Micro-optical system as integration platform for III-N nanowire based opto-chemical detectors
Kleindienst, R., Cimalla, V., Eickhoff, M., Grewe, A., Holc, K., Schätzle, J., Schwarz, U., Teubert, J., Sinzinger, S., von Freymann, Georg, Schoenfeld, Winston V., Rumpf, Raymond C.Volume:
8613
Year:
2013
Language:
english
DOI:
10.1117/12.2002411
File:
PDF, 2.83 MB
english, 2013