Properties of Chemically Vapor-Deposited Amorphous SiN...

Japanese Journal of Applied Physics 1982 / 10 Vol. 21; Iss. Part 1, No

Properties of Chemically Vapor-Deposited Amorphous SiN x Alloys

Sasaki, Goro, Kondo, Makoto, Fujita, Shizuo, Sasaki, Akio
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Volume:
21
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.21.1394
Date:
October, 1982
File:
PDF, 843 KB
1982
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