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Reactive Synthesis of Niobium Nitride by Pulse Laser Annealing
Nakamura, Kiko, Hikita, Makoto, Asano, Hidefumi, Terada, AkiraVolume:
21
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.21.672
Date:
April, 1982
File:
PDF, 254 KB
1982