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Q -Switched Nd:YAG Laser Annealing of an As Implanted Si Layer, and Its Application to a Buried Collector
Tsunoda, YoshihiroVolume:
21
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.21.L106
Date:
February, 1982
File:
PDF, 846 KB
1982