Study of Beam Divergence of a Low-Energy (1–3 keV) Ion...

Japanese Journal of Applied Physics 1983 / 6 Vol. 22; Iss. Part 1, No

Study of Beam Divergence of a Low-Energy (1–3 keV) Ion Source

Yatsu, Kiyoshi, Aoki, Shinichi, Horie, Akira, Miyoshi, Syoich, Ōta, Kanzi, Okano, Kunihiko, Inoue, Nobuyuki, Uchida, Taijiro
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Volume:
22
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.22.1071
Date:
June, 1983
File:
PDF, 237 KB
1983
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