![](/img/cover-not-exists.png)
Glow-Discharge Deposition of Amorphous Silicon from SiH 3 F
Matsuda, Akihisa, Yagii, Kiyoshi, Kaga, Takao, Tanaka, KazunobuVolume:
23
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.23.L576
Date:
August, 1984
File:
PDF, 348 KB
1984