Glow-Discharge Deposition of Amorphous Silicon from SiH...

Glow-Discharge Deposition of Amorphous Silicon from SiH 3 F

Matsuda, Akihisa, Yagii, Kiyoshi, Kaga, Takao, Tanaka, Kazunobu
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Volume:
23
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.23.L576
Date:
August, 1984
File:
PDF, 348 KB
1984
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