Recrystallization of Silicon-on-Insulator Structures by Sinusoidally-Scanned Electron Beams
Ishiwara, Hiroshi, Ohyu, Kiyonori, Horita, Susumu, Furukawa, SeijiroVolume:
24
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.24.126
Date:
February, 1985
File:
PDF, 1.60 MB
1985