Facet Formation in Selective Silicon Epitaxial Growth
Ishitani, Akihiko, Kitajima, Hiroshi, Endo, Nobuhiro, Kasai, NaokiVolume:
24
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.24.1267
Date:
October, 1985
File:
PDF, 1.37 MB
1985