Analysis of Discharge Properties in CCl 2...

Japanese Journal of Applied Physics 1985 / 10 Vol. 24; Iss. Part 1, No

Analysis of Discharge Properties in CCl 2 F 2 by the Boltzmann Equation Method

Okabe, Shigemitsu, Kouno, Teruya
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Volume:
24
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.24.1335
Date:
October, 1985
File:
PDF, 812 KB
1985
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