Coating Films of Titanium Nitride Prepared by Ion and Vapor...

Japanese Journal of Applied Physics 1985 / 6 Vol. 24; Iss. Part 1, No

Coating Films of Titanium Nitride Prepared by Ion and Vapor Deposition Method

Satou, Mamoru, Andoh, Yasunori, Ogata, Kiyoshi, Suzuki, Yasuo, Matsuda, Koji, Fujimoto, Fuminori
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Volume:
24
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.24.656
Date:
June, 1985
File:
PDF, 768 KB
1985
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