A Stable High-Brightness Electron Gun with Zr/W-tip for...

Japanese Journal of Applied Physics 1985 / 6 Vol. 24; Iss. Part 1, No

A Stable High-Brightness Electron Gun with Zr/W-tip for Nanometer Lithography. I. Emission Properties in Schottky- and Thermal Field-Emission Regions

Samoto, Norihiko, Shimizu, Ryuichi, Hashimoto, Hatsujiro, Tamura, Nobuaki, Gamo, Kenji, Namba, Susumu
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Volume:
24
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.24.766
Date:
June, 1985
File:
PDF, 1.80 MB
1985
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