Ar + Ion Bombardment Effect on...

Japanese Journal of Applied Physics 1985 / 4 Vol. 24; Iss. Part 2, No

Ar + Ion Bombardment Effect on Composition Variation in Ni-Fe Film Formed by Ion Beam Sputtering

Nagai, Yasuhiro, Nishimura, Chikara, Toshima, Tomoyuki
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Volume:
24
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.24.L272
Date:
April, 1985
File:
PDF, 458 KB
1985
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