Alignment Signal from a Mark Deformed by Molecular Beam Epitaxial Overgrowth for Focused Ion Beam Implantation
Morita, Tetsuo, Takamori, Akira, Arimoto, Hiroshi, Miyauchi, Eizo, Hashimoto, HisaoVolume:
26
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.26.L234
Date:
April, 1987
File:
PDF, 704 KB
1987