Fabrication of Submicron Grating Patterns Usinc...

Japanese Journal of Applied Physics 1987 / 4 Vol. 26; Iss. Part 2, No

Fabrication of Submicron Grating Patterns Usinc Compositional Disordering of AlGaAs-GaAs Superlattices by Focused Si Ion Beam Implantation

Ishida, Koji, Miyauchi, Eizo, Morita, Tetsuo, Takamori, Takeshi, Fukunaga, Toshiaki, Hashimoto, Hisao, Nakashima, Hisao
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Volume:
26
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.26.L285
Date:
April, 1987
File:
PDF, 654 KB
1987
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