Comparison of Gettering Techniques by Means of Intentional...

Japanese Journal of Applied Physics 1988 / 7 Vol. 27; Iss. Part 1, No

Comparison of Gettering Techniques by Means of Intentional Quantitative Cu Contamination

Sano, Masakazu, Horai, Masataka, Miyazaki, Morimasa, Fujino, Nobukatsu, Shiraiwa, Toshio
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Volume:
27
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.27.1220
Date:
July, 1988
File:
PDF, 1.03 MB
1988
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