The Nature of Nitrogen-Oxygen Complexes in Silicon

Japanese Journal of Applied Physics 1988 / 1 Vol. 27; Iss. Part 1, No

The Nature of Nitrogen-Oxygen Complexes in Silicon

Suezawa, Masashi, Sumino, Koji, Harada, Hirofumi, Abe, Takao
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Volume:
27
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.27.62
Date:
January, 1988
File:
PDF, 850 KB
1988
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