ESR Centers in Fused Quartz Exposed to Glow-Discharge...

Japanese Journal of Applied Physics 1988 / 5 Vol. 27; Iss. Part 1, No

ESR Centers in Fused Quartz Exposed to Glow-Discharge Plasmas of Ar and H 2

Endo, Tamio, Taniguchi, Shizuo, Inaba, Ichiro, Katoh, Masayuki, Hayashi, Miyoshi, Sugiyama, Koichi
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Volume:
27
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.27.710
Date:
May, 1988
File:
PDF, 704 KB
1988
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