Formation of As-Grown YBaCuO Thin Films by RF Magnetron...

Japanese Journal of Applied Physics 1989 / 10 Vol. 28; Iss. Part 1, No

Formation of As-Grown YBaCuO Thin Films by RF Magnetron Sputtering from Three Targets

Kuroda, Ken'ichi, Kojima, Kazuyoshi, Tanioku, Masami, Yokoyama, Kazuo, Hamanaka, Koichi
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Volume:
28
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.28.1797
Date:
October, 1989
File:
PDF, 895 KB
1989
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