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As + -Preamorphization Method for Shallow p + -n Junction Formation
Kwon, Sang-Jik, Kim, Hyeong-Joon, Lee, Jong-DukVolume:
29
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L2326
Date:
December, 1990
File:
PDF, 353 KB
1990