Homogeneous Heteroepitaxial NiSi 2...

Japanese Journal of Applied Physics 1990 / 12 Vol. 29; Iss. Part 2, No

Homogeneous Heteroepitaxial NiSi 2 Formation on (100)Si

Kunishima, Iwao, Suguro, Kyoichi, Aoyama, Tomonori, Matsunaga, Junichi
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Volume:
29
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L2329
Date:
December, 1990
File:
PDF, 1.18 MB
1990
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