A Novel Optical Lithography Technique Using the...

Japanese Journal of Applied Physics 1991 / 5 Vol. 30; Iss. Part 1, No

A Novel Optical Lithography Technique Using the Phase-Shifter Fringe

Tanaka, Toshihiko, Uchino, Shouichi, Hasegawa, Norio, Yamanaka, Toshiaki, Terasawa, Tsuneo, Okazaki, Shinji
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Volume:
30
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.30.1131
Date:
May, 1991
File:
PDF, 1.07 MB
1991
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