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Generation Current Reduction at Local Oxidation of Silicon Isolation Edge by Low-Temperature Hydrogen Annealing
Kimura, Mikihiro, Motonami, Kaoru, Onodera, YasuhikoVolume:
30
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.30.3634
Date:
December, 1991
File:
PDF, 579 KB
1991