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Characteristics of Zinc Oxide Films on Glass Substrates Deposited by RF-Mode Electron Cyclotron Resonance Sputtering System
Kadota, Michio, Kasanami, Toru, Minakata, MakotoVolume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.2341
Date:
May, 1993
File:
PDF, 1.22 MB
1993