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BaTiO 3 Films for Silicon-on-Insulator Structure
Yamanashi, Akira, Tanaka, Keiichi, Nagatomo, Takao, Omoto, OsamuVolume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.4179
Date:
September, 1993
File:
PDF, 488 KB
1993