Co-Precipitation of Carbon and Oxygen in Silicon: The...

Co-Precipitation of Carbon and Oxygen in Silicon: The Dominant Flux Criterion

Taylor, William J., Gösele, Ulrich M., Tan, Teh Y.
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Volume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.4857
Date:
November, 1993
File:
PDF, 1.05 MB
1993
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