A Schottky-Emitter Electron Source for Wide Range...

Japanese Journal of Applied Physics 1993 / 12 Vol. 32; Iss. Part 1, No

A Schottky-Emitter Electron Source for Wide Range Lithography Applications

Koek, Bert H., Chisholm, Thomas, Davey, Julian P., Romijn, Johannes, Run, Arnold J. v.
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Volume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.5982
Date:
December, 1993
File:
PDF, 2.19 MB
1993
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