Mechanism of CF Polymer Film Deposition through High-Aspect-Ratio $\bf SiO_{2}$ Holes
Ono, Tetsuo, Hamasaki, Ryoji, Mizutani, TatsumiVolume:
33
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.L1717
Date:
December, 1994
File:
PDF, 644 KB
1994