Direct Observation of Species Liberated from GaAs Native...

Japanese Journal of Applied Physics 1994 / 5 Vol. 33; Iss. Part 2, No

Direct Observation of Species Liberated from GaAs Native Oxides during Atomic Hydrogen Cleaning

Yamada, Masamichi, Ide, Yuichi
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Volume:
33
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.L671
Date:
May, 1994
File:
PDF, 723 KB
1994
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